Refractory metals
BaoJi Fitow Metal Co., LTD
Tel : 8613909176258
Email: sales@fitowmetal.com
Add:Tai Cheng Road ,WeiBin Bistrict,Baoji City,ShaanXi Province,China Zip code :721013
Zr Zirconium Circular Targets
Zr Zirconium Circular Targets
| ommodity | Zr Zirconium Circular Targets | ||||||||
| Grade | R60702,R60703,R60704,R60705,R60706 | ||||||||
| Standard | ASTM B550 | ||||||||
| Specification | Dia.10mm--260mm *Thickness1-50mm | ||||||||
| Grade | Element composition(%)< | ||||||||
| Zr+Hf | Hf | Fe+Cr | Sn | H | N | C | Nb | O | |
| R60702 | ≥99.2 | ≤4.5 | 0.2 | -- | 0.005 | 0.025 | 0.05 | -- | 0.16 |
| R60703 | ≥98 | ≤4.5 | -- | -- | 0.005 | 0.025 | -- | -- | -- |
| R60704 | ≥97.5 | ≤4.5 | 0.20~0.40 | 1.0~2.0 | 0.005 | 0.025 | 0.05 | -- | 0.18 |
| R60705 | ≥95.5 | ≤4.5 | 0.2 | -- | 0.005 | 0.025 | 0.05 | 2.0~3.0 | 0.18 |
| R60706 | ≥95.5 | ≤4.5 | 0.2 | -- | 0.005 | 0.025 | 0.05 | 2.0~3.0 | 0.18 |
| Grade(ASTM) | Zr702 ( R60702) | Zr704 ( R60704) | Zr705 ( R60705) | Zr706 ( R60706) |
| Tensile Strength min(Mpa) | 380 | 415 | 550 | 510 |
| Yield Strength min(Mpa) | 205 | 240 | 380 | 345 |
| Tensile Strength max(Mpa) | ||||
| Yield Strength max(Mpa) | ||||
| Elongation min(%) | 16 | 14 | 16 | 20 |
(1) Flatness Standard;
|
Shape |
Round |
Square |
Round |
Square |
Square |
Remarks |
|
Dimension(mm) |
D≤300 |
L≤500 |
D>300 |
500 |
X>1000 |
|
|
Tolerance(mm) |
0.1 |
0.3 |
0.5 |
Thickness>8mm
|
||
|
Tolerance(mm) |
0.25 |
0.35 |
0.5 |
Thickness≤8mm
|
||
(2)Parallelism and Perpendicularity
|
Dimension(mm) |
D≤300 |
L≤400 |
D>300 |
400 |
X>800 |
|
Parallelism(mm) |
0.1 |
0.25 |
0.3 |
||
|
Perpendicularity(mm) |
0.15 |
0.25 |
0.3 |
||
(3)Roughness
|
Part |
Back |
Sputtering surface |
The side and other surfaces |
|
Ra(μm) |
0.8-1.6 |
0.8-1.6 |
3.2 |
