BaoJi Fitow Metal Co., LTD
Tel : 8613909176258
Email: sales@fitowmetal.com
Add:Tai Cheng Road ,WeiBin Bistrict,Baoji City,ShaanXi Province,China Zip code :721013
Tantalum Ta Sputtering Target
Symbol: Ta
Atomic number: 73
Atomic weight: 180.95
Boiling Point: 5425.00°C (9797.0F)
Melting Point: 2996.00°C(5424.8F)
Density : 16.6g/cm3
CAS Registry ID: 7440-25-7
Tantalum is a grayish silver, dense, ductile, very hard, easily fabricated, and highly corrosion resistant metal. It is part of the refractory metals group and occurs naturally in the mineral tantalite, always together with the chemically similar niobium.
Tantalum is almost completely immune to chemical attack at temperatures below 150°C, and is attacked only by hydrofluoric acid, acidic solutions containing the fluoride ion, and free sulphur trioxide. The element has a melting point exceeded only by tungsten and rhenium.
1. Standard: ASTM B708
2. Grand: RO5200, RO5400, RO5252(Ta-2.5W), RO5255(Ta-10W)
3. Size:Circular Targets: Diameter(50-400)mm *Thickness(5-30)mm
Rectangular Targets: Thickness (1~50)mm*Width (1000)mm*Length (1000~2500)mm
Product Feature: High melting point, High-density, high temperature oxidation resistance, long service life, resistance
Chemical Compositions of tantalum target
|
Chemistry ppm |
||||||||||||
|
Designation |
Chief component |
Impurities maxmium |
||||||||||
|
Ta |
Nb |
Fe |
Si |
Ni |
W |
Mo |
Ti |
O |
C |
H |
N |
|
|
Ta1 |
Remainder |
300 |
40 |
30 |
20 |
40 |
40 |
20 |
150 |
40 |
15 |
20 |
|
Ta2 |
Remainder |
800 |
100 |
100 |
50 |
200 |
200 |
50 |
200 |
100 |
15 |
100 |
|
TaNb3 |
Remainder |
<35000 |
100 |
100 |
50 |
200 |
200 |
50 |
200 |
100 |
15 |
100 |
|
TaNb20 |
Remainder |
170000- 230000 |
100 |
100 |
50 |
200 |
200 |
50 |
200 |
100 |
15 |
100 |
|
Ta2.5W |
Remainder |
400 |
50 |
30 |
20 |
30000 |
60 |
20 |
150 |
50 |
15 |
60 |
|
Ta10W |
Remainder |
400 |
50 |
30 |
20 |
110000 |
60 |
20 |
150 |
50 |
15 |
60 |
